UDC 621.382
DOI: 10.36871/ek.up.p.r.2024.08.05.010
Authors
Anton V. Semennikov,
Kazan State Energy University, Kazan, Russian Federation
Abstract
The article reviews current innovations in the field of microelectromechanical systems (MEMS), including recent advances in materials, manufacturing technologies, and design. Particular attention is paid to the integration of MEMS with other technologies, such as nanoelectromechanical systems (NEMS) and microelectronics. Examples of innovative MEMS applications in medicine, automotive, and consumer electronics illustrate the importance of these systems in various industries. Trends and prospects for the development of MEMS, as well as the technological and commercial challenges this field faces, are discussed.
Keywords
MEMS, innovations, microelectromechanical systems, NEMS, materials, manufacturing technologies, integration, biosensors, automotive sensors, consumer electronics, development trends
